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Photonics Sputter Deposition System For Hydrophobic Composition Film / PVD High Conductive Film Deposition

Categories Magnetron Sputtering Coating Machine
Brand Name: ROYAL
Model Number: RTSP1213
Certification: CE certification
Place of Origin: Made in China
MOQ: 1 set
Price: negotiable
Payment Terms: L/C, D/A, D/P, T/T
Supply Ability: 6 sets per month
Delivery Time: 16 weeks
Packaging Details: Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation.
Deposition Sources: Balance/Unbalanced Closed Magnetic Filed
Applications: Automotive, semiconductor, SiC Coating, DLC film deposition,
Film Thickness: Range from 100 nm to 12μm, thickness tolerance ±5%
Factory Location: Shanghai city, China
Worldwide Service: Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America
Training Service: Machine operation, maintenance, coating process Recipes, program
Warranty: Limited warranty 1 year for free, whole life for machine
OEM & ODM: available, we support tailor made design and fabrication
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    Photonics Sputter Deposition System For Hydrophobic Composition Film / PVD High Conductive Film Deposition

    Photonics Sputter Deposition System For Hydrophobic Composition Film And Other Functional Films


    Applications:


    The RTSP1213 machine is a batch model sputtering system, can deposits various hard coatings, soft coatings, compound films and solid lubricating films on the metallic and non-metallic materials substrates. Applied to industries of Hydrogen Fuel Cell vehicles, photonics products, aerospace and other new energy industries.


    Properties:


    To improve the conductivity of surface;

    High corrosion resistance;

    High wear resistance;

    High hardness

    Hydrophobic composition film and other functional films

    Available for compound coatings: metallic and non-metallic films.

    Film thickness range from 100nm to 12μm, thickness tolerance ±5%
    Strong adhesion.

    Low tempering parts surface hardening treatment.


    Type:


    Vertical orientation, polyhedron structure, 2-doors (front and back )


    Features:

    • Environmentally friendly system, no industrial waste water, air and noise pollution;
    • Easy Operation: Touch screen + PLC control and unique software program for one touch operation, more than 80% trouble shootings alarm.
    • Up to 10 processing recipes login and backup; high repeatability and diversity.
    • Special design of Carousel system for high uniformity of film deposition.
    • High productivity and high quality
    • Stable and reliable system, running 365 days * 24hrs ( maintenance and repair breaking time)
    • Efficiency pumping system: shorter vacuum piping lines for maximum piping speed with well known Europe brand pumps
    • Compact design occupy minimum installation space.

    Technical Specifications


    • Performance

    1. Ultimate Vacuum Pressure: better than 8.0*10-5 Pa;

    • Base Vacuum pressure: 3.0*10-4 Pa

    3. Pumping down Time: from atm to 1.0×10-3 Pa≤15 minutes ( room temperature, dry, clean and empty chamber)

    4. Deposition source: balanced/unbalanced sputtering cathodes

    5. Operating Model: Full Automatically /Semi-Auto/ Manually

    6. Heating: from room temperature up to max. 450℃,

    7. Plasma cleaning and Plasma assist deposition: Anode Linear Ion Source

    8. Magnetic Closed - Loop filed. (Unbalance/balance cathodes)

    9. Bias Power supply for glow discharging.

    • Structure

    The vacuum coating machine contains key completed system listed below:


    1. Vacuum Chamber
    1.1 Size: Inner Diameter 1200mm

    Inner Height: 1300mm

    1.2 Material: Vacuum Chamber SUS304

    Door and flanges SUS304

    Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

    Chamber chassis SS41 mild steel with painted finishing surface treatment.

    1.3 Sputtering Shield : SUS304

    1.4 View Window: on chamber door - 4 sets ( 2 on each door)

    1.5 Vacuum Chamber Venting Valve (including silencer)

    1.6 Door: SUS304 material


    2. Roughing Vacuum Pumping System:


    Oil rotary vane vacuum pump +Roots pump + Holding Pump ( Leybold)


    3. High Vacuum Pumping System:


    Magnetic Suspension Molecular Pump ( Leybold )

    • Gate valves - 2 sets

    4. Electrical Control and Operation System- PLC+ Touch Screen


    4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

    4.2 Sputtering Power Supply + Ion source power supply + Bias Power Supply ( Advanced Energy )

    4.3 Sputtering deposition control system

    4.4 Operation System: Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating

    4.5 Measuring System

    Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge -- Europe brand

    Temperature measuring device: Thermocouple
    MFC: Mass Flow Controller ( 4 ways), digital display mode-- Europe brand

    4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation

    4.7 Power Load Indicator: Voltage indicator and load current indicator


    5. Deposition System

    5.1 Deposition source: Sputtering cathodes, Ion source -- Europe brand

    5.2 Deposition material: Carbon target


    6. Sub-System

    6.1 Air Compressed Valve Control System

    6.2 Cooling Water System:Water flow pipe and switch valve system


    7.Working Environment

    Compressed Air: 5~8kg/cm2

    Cooling Water: Water-In Temperature: 20~25℃, 200 Liter/min,
    Water-In Pressure: 2~3 kg/cm2,


    Power: 3 Phase 380V 50Hz(60Hz), 75kVA, average power consumption: 40KW

    Installation Area: (L*W*H) 3000*4000*3200mm

    Exhaust: Vent for mechanical pumps


    Why us?

    1. Advanced production machineries (milling, welding,cutting,vacuum leak testing)combined with standardized production procedures and strict tests enable Royal Technology to produce high quality, reliable and low cost coating systems.

    2. Quality, service and on-time delivery are the core principles of Royal technology’s business. A strategy of openly outsourcing simple components to professional manufactures allows us to focus attention to key parts and components R&D, manufacturing.

    3. Strict quality control policies and rigorous selection of qualified suppliers assure Royal Technology’s customers receive the most advanced, high-end quality equipment at the most affordable cost.


    Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.


    To download the completed brochure, please click here: R&D vacuum coating machine - PECVD + PVD depositio...

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